Detail Information

BACK

Category Article
Author Hayami,Y.:M. T. Suzuki:Y. Okui:H. Ogawa:S. Fujimura
Article Title Characterization of cleaning technology for silicon surfaces by hot water containing little dissolved oxygen
Institution Japan Journal of Applied Physics
Volume vol.35
Number
Page 4577
Date 1996
Abstract
Notes
URL
Label 技術経営
Register date 1996/12/31

BACK